Details

Autor(en) / Beteiligte

• Yokoyama, Yuya
• Dohi, Tetsuji

Titel

A low resistance and low parasitic capacitance micro coil for MRI fabricated by selective deposition on 3D printed stepped helical structures

Ist Teil von

• 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), 2016, p.477-480

Ort / Verlag

IEEE

Erscheinungsjahr

2016

Link zum Volltext

Quelle

IEEE/IET Electronic Library (IEL)

Beschreibungen/Notizen

• This paper reports on a bicone-shaped micro coil for magnetic resonance imaging (MRI) that has a low resistance and a low parasitic capacitance. The micro coil was fabricated by vacuum evaporation and electroplating of Cu onto the stepped helical structures made by three-dimensional (3D) printer. Because the helical structure was fixed on the rotary-tilted stage, Cu was evaporated only on the wiring part of the helical structure. Furthermore, we could decrease the resistance by electroplating and by increasing the linewidth of the wiring fabricated by the 3D printer. Using the fabricated bicone-shaped coil, we obtained high signal-to-noise ratio (SNR) MRI images.