Details

Autor(en) / Beteiligte

• Nishiumi, Taiki
• Yamashita, Kaoru
• Tanaka, Hikaru
• Arai, Kaito
• Noda, Minoru

Titel

Vibration mode analysis on piezoelectric diaphragms for ultrasonic microsensors

Ist Teil von

• 2015 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK), 2015, p.86-87

Ort / Verlag

IEEE

Erscheinungsjahr

2015

Quelle

IEEE Electronic Library Online

Beschreibungen/Notizen

• Piezoelectric diaphragm-type ultrasonic microsensors were fabricated and their vibration modes were investigated from the viewpoint of sensitivity affected by the distribution of piezoelectrically induced polarization. Three kinds of diaphragms were fabricated with the geometries of square-flat, square-buckled and circular-buckled, to clarify the effect of the diaphragm geometry to higher-order vibrations generated by a received ultrasound pulse. The square-flat diaphragms showed less higher-order vibrations compared to the square-buckled ones, and the circular-buckled showed even less higher-order vibration among them and is the suitable geometry for the piezoelectric diaphragm sensors.