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2015 IEEE 33rd VLSI Test Symposium (VTS), 2015, p.1-6
Ort / Verlag
IEEE
Erscheinungsjahr
2015
Quelle
IEEE Xplore
Beschreibungen/Notizen
We investigate the utility of correlations between e-test and probe test measurements in predicting yield. Specifically, we first examine whether statistical methods can accurately predict parametric probe test yield as a function of e-test measurements within the same fab. Then, we investigate whether the e-test profile of a destination fab, in conjunction with the e-test and probe test profiles of a source fab, suffice for accurate yield prognosis during fab-to-fab product migration. Results using an industrial dataset of ~3.5M devices from a 65nm Texas Instruments RF transceiver design fabricated in two different fabs reveal that (i) within-fab yield prediction error is in the range of a few tenths of a percentile point, and (ii) fab-to-fab yield prediction error is in the range of half a percentile point.