Details

Autor(en) / Beteiligte

• Dubecky, F.
• Gombia, E.
• Vanko, G.
• Ferrari, C.
• Zat'ko, B.
• Kovac, P.
• Bacek, D.
• Baldini, M.
• Ryc, L.
• Necas, V.

Titel

Surface barrier 4H-SiC soft X-ray detecor for hot plasmas diagnostic

Ist Teil von

• The Ninth International Conference on Advanced Semiconductor Devices and Mircosystems, 2012, p.247-250

Ort / Verlag

IEEE

Erscheinungsjahr

2012

Quelle

IEEE Electronic Library Online

Beschreibungen/Notizen

• The work reports on the characterization of high purity epitaxial 4H-SiC grown by liquid phase epitaxy and the performances of Au-Ni/4H-SiC detectors fabricated on the same material. X-ray diffraction and topography as well as I-V, C-V and DLTS measurements are used for the evaluation of the material properties and device characteristics. The X-ray detection abilities are evaluated by pulse-height spectra measurements of the 241 Am. Preliminary results of the detector hardness to fast neutron and gamma ray radiations are also reported.