Details

Autor(en) / Beteiligte

• Gao, Tingting
• Du, Chunling
• Tan, Cheng Peng
• He, Zhimin
• Yang, Jiaping
• Xie, Lihua

Titel

High Bandwidth Control Design and Implementation for a Dual-Stage Actuation System With a Microthermal Actuator

Ist Teil von

• IEEE transactions on magnetics, 2013-03, Vol.49 (3), p.1082-1087

Ort / Verlag

New York, NY: IEEE

Erscheinungsjahr

2013

Link zum Volltext

• IEEE_Xplore

Quelle

IEEE Electronic Library (IEL)

Beschreibungen/Notizen

• This paper is devoted to the control design and implementation of the dual-stage actuation system with a newly developed microthermal actuator (MTA) as the secondary actuator. The characterization and modeling of this new MTA is presented for controller design. Its performances such as stroke, time constant, and a good linearity are exhibited. The controller design of the MTA-based dual-stage actuation system is then proposed, and aims to push the bandwidth with the MTA. The simulation and the experimental testing have demonstrated the achievable 6-kHz bandwidth with 60-kHz sampling rate, the MTA displacement of 15 nm at 4 kHz, and 0.1-ms seeking time for 40-nm seeking length.