Details

Autor(en) / Beteiligte

• Chan, W. S.
• Talghader, J. J.
• Saarinen, M. J.

Titel

Electrostatic actuator for coupling quantum well electron states

Ist Teil von

• 2012 International Conference on Optical MEMS and Nanophotonics, 2012, p.142-143

Ort / Verlag

IEEE

Erscheinungsjahr

2012

Link zum Volltext

• IEEE_Xplore

Quelle

IEEE Xplore

Beschreibungen/Notizen

• An actuator was designed and fabricated to actively tune the nanometer-scaled gap between quantum wells in a collapsed cantilever structure. Maximum actuation of 55nm was achieved. Photoluminescence from the quantum wells at the collapsed cantilever was observed at cryogenic temperature, indicating that the wells remained intact after fabrication.