Details

Autor(en) / Beteiligte

• Kratt, K.
• Waselikowski, S.
• Badilita, V.
• Wallrabe, U.
• Walther, M.
• Korvink, J. G.

Titel

3-D microcoils as a metamaterial with electric and magnetic response

Ist Teil von

• 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, 2011, p.2666-2669

Ort / Verlag

IEEE

Erscheinungsjahr

2011

Quelle

IEEE Electronic Library Online

Beschreibungen/Notizen

• This paper reports a terahertz metamaterial consisting of 3-D microcoils fabricated with an automatic wire bonder in a fully MEMS-compatible manner. The response of the system to an incident electromagnetic wave was characterized by terahertz time-domain spectroscopy (TDS) and by numerical simulations. Depending on the light polarization relative to the structure, fundamental and higher order electric or magnetic resonances were excited in the coils.