Details

Autor(en) / Beteiligte

• Ziaei-Moayyed, M
• Habermehl, S D
• Branch, D W
• Clews, P J
• Olsson, R H

Titel

Silicon carbide lateral overtone bulk acoustic resonator with ultrahigh quality factor

Ist Teil von

• 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, 2011, p.788-792

Ort / Verlag

IEEE

Erscheinungsjahr

2011

Quelle

IEEE Electronic Library (IEL)

Beschreibungen/Notizen

• This work demonstrates a lateral overtone bulk acoustic resonator (LOBAR), which consists of an aluminum nitride (AlN) transducer coupled to a suspended thin silicon carbide (SiC) film fabricated using standard CMOS-compatible processes. The LOBAR design allows for high transduction efficiency and quality factors, by decoupling the transduction and energy storage schemes in the resonator. The frequency and bandwidth of the resonator were lithographically defined and controlled. A LOBAR operating at 2.93GHz with a Q greater than 100,000 in air was fabricated and characterized, having the highest reported f×Q product of any acoustic resonator to date.