Details

Autor(en) / Beteiligte

• Wen, C.-Y
• Chua, E K
• Zhao, R
• Chong, T C
• Bain, J A
• Schlesinger, T E
• Pileggi, L T
• Paramesh, J

Titel

A phase-change via-reconfigurable on-chip inductor

Ist Teil von

• 2010 International Electron Devices Meeting, 2010, p.10.3.1-10.3.4

Ort / Verlag

IEEE

Erscheinungsjahr

2010

Link zum Volltext

• IEEE_Xplore

Quelle

IEL

Beschreibungen/Notizen

• This paper describes a new approach to the realization of reconfigurable CMOS-compatible RF inductors using programmable vias made from phase-change (PC) materials. Reversible reconfiguration of a custom-fabricated inductor prototype is demonstrated using voltage pulses to transform (by Joule heating) the PC switch between crystalline (ON) and amorphous (OFF) states. The RF performance shows an inductance of 1.9 (0.9) nH at 2 (5) GHz with quality factor (Q) of 12.4 (5.8) in the OFF (ON) state.