Details

Autor(en) / Beteiligte

• Baixiang Zheng
• Wei Tang
• Zhe Che
• Haixia Zhang

Titel

A continuous-time voltage readout for SiC micromechanical capacitive pressure sensor

Ist Teil von

• 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, 2010, p.748-751

Ort / Verlag

IEEE

Erscheinungsjahr

2010

Quelle

IEEE Xplore

Beschreibungen/Notizen

• This paper presents a CMOS capacitive sensing amplifier for a SiC MEMS capacitive pressure sensor. Noise performance and noise optimization studied from a theoretical point of view. This amplifier is a differential difference amplifier (DDA) with optimal transistor sizing to minimize sensor noise floor. The simulation result shows that the circuit can obtain a stable and linear voltage, and Continuous-Time Voltage is an ideal choice compared to other method for sensing ultra-small capacitance change of the MEMS sensors.