Details

Autor(en) / Beteiligte

• Assefa, S.
• Fengnian Xia
• Bedell, S.W.
• Ying Zhang
• Topuria, T.
• Rice, P.M.
• Vlasov, Y.A.

Titel

CMOS-integrated 40GHz germanium waveguide photodetector for on-chip optical interconnects

Ist Teil von

• 2009 Conference on Optical Fiber Communication - incudes post deadline papers, 2009, p.1-3

Ort / Verlag

IEEE

Erscheinungsjahr

2009

Quelle

IEEE/IET Electronic Library (IEL)

Beschreibungen/Notizen

• Compact (0.7 mum times 20mum) germanium waveguide photodetector operating at 40 Gbps is demonstrated. Monolithic integration of high-quality Ge-on-insulator single-crystalline layer into the CMOS stack was achieved by lateral seeded crystallization during CMOS wells activation anneal above germanium melting temperature.