Details

Autor(en) / Beteiligte

• Zhu, B.P.
• Wu, D.W.
• Zhou, Q.F.
• Shung, K.K.

Titel

Lead zirconate titanate thick film with enhanced electrical properties for high frequency transducer applications

Ist Teil von

• 2008 IEEE Ultrasonics Symposium, 2008, p.70-73

Ort / Verlag

IEEE

Erscheinungsjahr

2008

Quelle

IEEE Xplore

Beschreibungen/Notizen

• Piezoelectric Pb(Zr 0.52 Ti 0.48 )O 3 thick film with the thickness around 10 mum has been deposited on the (111) Pt/Ti/SiO 2 /Si substrate using a ceramic powder/sol-gel solution modified composite method. X-ray diffraction analysis and scanning electron microscope revealed that the film was in the well-crystallized perovskite phase and cracked free. At 1 KHz, The dielectric constant and the loss were 1925 and 0.015, respectively. The remnant polarization was 42.0 muC/cm 2 at room temperature. A high frequency single element acoustic transducer fabricated with this film showed a bandwidth at -6 dB of 50% at 156 MHz.