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A novel design method of low profile cavity backed planar slot antenna has been described in this paper. The whole antenna including backed cavity and feeding element is completely constructed at a single substrate by using substrate integrated waveguide technique and grounded coplanar waveguide. An example with 1.7% bandwidth has been presented, which has 5.4 dBi gain, 16.1 dB front-to-back ratio and -19 dB maximum cross polarized radiation level with its total thickness less than lambda 0 /50. The proposed antenna keeps good radiation performance of conventional cavity backed antenna and has advantages of conventional planar antenna including low profile, light weight, easy fabrication with low cost and convenient integration with planar circuit.