Details

Autor(en) / Beteiligte

• Maeno, R.
• Konishi, M.
• Imai, J.
• Nishi, T.

Titel

Petri Net Solver for Semiconductor Manufacturing Plan

Ist Teil von

• Second International Conference on Innovative Computing, Informatio and Control (ICICIC 2007), 2007, p.317-317

Ort / Verlag

IEEE

Erscheinungsjahr

2007

Quelle

IEEE/IET Electronic Library (IEL)

Beschreibungen/Notizen

• Petri net model is a widely used versatile tool which can represent a discrete event system such as mechanical system, communication system, and production system. The merit of this model is easiness in handling. Other merit of the model is descriptive easiness in parallel, synchronous operations. In addition, it is applicable to a wide variety of discrete event system due to its excellence in the analytical ability and the handling ability. In this paper, application of Petri net solver by decomposition to the semiconductor manufacturing is presented. Numerical results showed the practicability of the proposed method.