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Monolithic Phase Shifter Based on Mechanically Tunable Saw Delay Line
Ist Teil von
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, 2007, p.161-164
Ort / Verlag
IEEE
Erscheinungsjahr
2007
Quelle
IEEE Electronic Library (IEL)
Beschreibungen/Notizen
This paper presents results of mechanically controlling the phase velocity of surface acoustic waves (SAW) and the application to monolithic phase shifters operating at 0.1~10 GHz. A phase sensitivity of 2°/V and sensitivity of the phase velocity (Δv/v) of 41×10 -6 /V have been measured for devices operating at 2.45 GHz. This is 2 orders of magnitude larger than existing SAW-based monolithic phase shifters. The acoustic wavelength being 10.000 times smaller than the free space equivalent together with the large sensitivity lead to a 50~500 times reduced device area compared to existing phase shifters.