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A simple room temperature fluorination process for highly ordered pyrolytic graphite (HOPG) and single walled carbon nanotube (SWCNT) surfaces is presented and discussed. Graphite and SWCNT surfaces are functionalised using radio frequency SF 6 plasma. Samples were characterised before and after treatment using XPS, EDX, SEM, and STM techniques. It is found that functionalisation of SWCNT surfaces occurs rapidly indicating an efficient fluorination process with minimal damage to the carbon surfaces, and furthermore, without presence of sulphur-containing functional groups