TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, 1991, p.943-948
1991
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Details
- Autor(en) / Beteiligte
- Titel
- Mechanical testing of thin films
- Ist Teil von
- TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, 1991, p.943-948
- Ort / Verlag
- IEEE
- Erscheinungsjahr
- 1991
- Quelle
- IEL
- Beschreibungen/Notizen
- The authors briefly discuss standard testing methods for thin films and compare them with a number of newer techniques. Basic material considerations in thin film stresses and deformation are summarized. Finally, microcantilever beam bending and wafer curvature experiments are presented as representative of recent work in mechanical testing of thin films.< >
- Sprache
- Englisch
- Identifikatoren
- ISBN: 9780879425852, 0879425857DOI: 10.1109/SENSOR.1991.149045Titel-ID: cdi_ieee_primary_149045
- Format
- –
- Schlagworte
- Dielectric thin films, Mechanical factors, Microelectronics, Optical films, Sputtering, Substrates, Temperature, Testing, Thermal stresses, Transistors