17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest, 2004, p.470-473
2004
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Details
- Autor(en) / Beteiligte
- Titel
- Micro-patterned electret for high power electrostatic motor
- Ist Teil von
- 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest, 2004, p.470-473
- Ort / Verlag
- Piscataway NJ: IEEE
- Erscheinungsjahr
- 2004
- Quelle
- IEEE Electronic Library Online
- Beschreibungen/Notizen
- This paper describes the charging method of a micro-patterned electret for a high power electrostatic motor. By applying contact electrification using mercury to electret charging, charging to 5 /spl mu/m-wide micro-patterned electret was achieved. But, 0.9 /spl mu/m-wide edges of the electret is not charged due to discharge at the edges. Using this method, a silicon-dioxide electret with 0.5 /spl mu/m thickness was charged up to a charge density of about -100 V//spl mu/mSiO/sub 2/ with fair repeatability.
- Sprache
- Englisch
- Identifikatoren
- ISBN: 078038265X, 9780780382657DOI: 10.1109/MEMS.2004.1290624Titel-ID: cdi_ieee_primary_1290624
- Format
- –
- Schlagworte
- Applied sciences, Conducting materials, Electrets, Electronics, Electrostatics, Exact sciences and technology, Induction generators, Instruments, apparatus, components and techniques common to several branches of physics and astronomy, Insulation, Mechanical instruments, equipment and techniques, Micro- and nanoelectromechanical devices (mems/nems), Micromechanical devices, Micromechanical devices and systems, Micromotors, Physics, Power generation, Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices, Silicon compounds, Surface charging