Details

Autor(en) / Beteiligte

• Shea, H.R.
• Arney, S.
• Gasparyan, A.
• Haueis, M.
• Aksyuk, V.A.
• Bolle, C.A.
• Frahm, R.E.
• Goyal, S.
• Pardo, F.
• Simon, M.E.

Titel

Design for reliability of MEMS/MOEMS for lightwave telecommunications

Ist Teil von

• The 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society, 2002, Vol.2, p.418-419 vol.2

Ort / Verlag

IEEE

Erscheinungsjahr

2002

Quelle

IEEE Xplore

Beschreibungen/Notizen

• The influences of materials systems, processing subtleties, and reliability requirements on the design, flexibility, functionality and commercialization of MOEMS are complex. A tight interdependent feedback loop between component/subsystem/system design, fabrication, packaging, manufacturing and reliability is described as a strategy for building reliability into emerging MOEMS products while accelerating commercialization.