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Discrete-Trap Effects on 3-D NAND Variability - Part I: Threshold Voltage
Ist Teil von
IEEE journal of the Electron Devices Society, 2024, Vol.12, p.651-657
Ort / Verlag
IEEE
Erscheinungsjahr
2024
Quelle
EZB Electronic Journals Library
Beschreibungen/Notizen
In this two-part article we discuss the difference between a continuous and a discrete approach to trap modeling in the simulation of 3-D NAND Flash memories with polysilicon channel. In Part I we focus on threshold voltage <inline-formula> <tex-math notation="LaTeX">({\mathrm { V}}_{\mathrm { T}}) </tex-math></inline-formula> fluctuations induced by traps and show that lower values for the average and rms <inline-formula> <tex-math notation="LaTeX">{\mathrm { V}}_{\mathrm { T}} </tex-math></inline-formula> arise when the discrete nature of traps is accounted for. We explain such differences in terms of a stronger percolation that leads to a lower number of filled traps in the discrete-trap case, and investigate such differences as a function of cell parameters and temperature. Finally, we compare the two approaches showing that a continuous trap model cannot reproduce the correct dependences resulting from a discrete treatment.