Details

Autor(en) / Beteiligte

• Yang, Hengzhang
• Gao, Jian
• Ding, Yingtao
• Su, Yuwen
• Yan, YangYang
• Xie, Huikai

Titel

A 3D Self-Roll Inductor Based on Al-SiO2 Bimorphs

Ist Teil von

• 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2023, p.845-848

Ort / Verlag

IEEJ

Erscheinungsjahr

2023

Quelle

IEEE Electronic Library Online

Beschreibungen/Notizen

• Integrable high-energy-density passives with small form factor are in high demand for consumer electronic applications. In this work, a novel three-dimensional (3D) inductor based on a multi-turn self-roll microtube is proposed. The self-roll microtube is made of an Al-SiO 2 bimorph structure that is fabricated directly on a high-resistivity silicon substrate. Only two steps of photolithography are needed and the fabrication process is CMOS-compatible. The released bimorphs typically roll into 2-turn microtubes with inner diameters of about 220 μm. The measured inductance areal density is over 120 nH/mm 2 for the fabricated single-microtube inductors. This type of 3D inductors has promising applications in RF transceivers.