Details

Autor(en) / Beteiligte

• Lin, Hung-Yu
• Cheng, Hao-Chien
• Liu, Shih-Chi
• Hsu, Chih-Chen
• Chen, Si-Han
• Hsieh, Jerwei
• Huang, Ruey-Shing
• Lai, Mei-Feng
• Fang, Weileun

Titel

A Resonant Piezoelectric MEMS Mirror with 180-Degree Optical Scan Angle Under Atmosphere Pressure

Ist Teil von

• 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2023, p.1417-1420

Ort / Verlag

IEEJ

Erscheinungsjahr

2023

Quelle

IEEE/IET Electronic Library (IEL)

Beschreibungen/Notizen

• This study designs and realizes the world's first resonant piezoelectric MEMS scanning mirror of a 180degree optical scan angle (±45-degree mechanical scan angle) without vacuum in published works. Which is close to the maximum of the human viewing angle. In Fig. 1, this design has three merits: (1) U-shape actuator (Fig. 1a): to generate a non-uniform distributed inertia force on the mirror plate (1.5mm in diameter) and further cause it rotate about the serpentine spring, (2) serpentine springs slightly off-set (distance "e") from the gravity center of mirror (Fig. 1a): to provide a moment arm to rotate the mirror, (3) serpentine spring (Fig. 1b): special shape design to lower the stress during large-angle scanning through the combination of bending and torsion on spring. Measurements demonstrate the scanner has an optical scan angle of 180-degree at the resonant frequency of 1.5kHz (no vacuum required) with driving voltage of 13V.