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High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range
Ist Teil von
Optics letters, 2020-08, Vol.45 (15), p.4248-4251
Ort / Verlag
Washington: Optical Society of America
Erscheinungsjahr
2020
Link zum Volltext
Quelle
Optica Publishing Group (OPG)
Beschreibungen/Notizen
We present a novel, to the best of our knowledge, Hartmann wave front sensor for extreme ultraviolet (EUV) spectral range with a numerical aperture (NA) of 0.15. The sensor has been calibrated using an EUV radiation source based on gas high harmonic generation. The calibration, together with simulation results, shows an accuracy beyond
λ
/
39
root mean square (rms) at
λ
=
32
n
m
. The sensor is suitable for wave front measurement in the 10 nm to 45 nm spectral regime. This compact wave front sensor is high-vacuum compatible and designed for in situ operations, allowing wide applications for up-to-date EUV sources or high-NA EUV optics.