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Channel waveguides based on thermally co-evaporated Te–Ge–Se films for infrared integrated optics
Ist Teil von
Journal of non-crystalline solids, 2013-10, Vol.377, p.205-208
Ort / Verlag
Oxford: Elsevier B.V
Erscheinungsjahr
2013
Link zum Volltext
Quelle
Elsevier ScienceDirect Journals Complete
Beschreibungen/Notizen
The feasibility of telluride based single-mode waveguides being able to guide light in the infrared region [1–16μm] is demonstrated. The rib waveguides comprise a silicon substrate, two Te–Ge–Se films deposited by thermal co-evaporation. The first one plays the role of a cladding layer while the second is the core layer. In order to control the light confinement, the second layer is further etched by reactive ion etching in CHF3/O2/Ar atmosphere. The obtained structures behaved as channel waveguides with a single-mode transmission demonstrated at 1.55μm. Transmission optical losses were evaluated by the cut-back method on the very first prototypes and were comprised between 0.6 and 1.8dBcm−1.
► The fabrication of single-mode channel waveguides based on TeGeSe films ► The TeGeSe films were deposited by thermal co-evaporation. ► The waveguides were made of a core and a cladding layer deposited onto silicon. ► The core layer was etched by reactive ion etching. ► The waveguides were characterized by propagation losses of 1.2±0.6dBcm−1.