Details

Autor(en) / Beteiligte

• Demidov, E.S
• Sdobnyakov, V.V
• Vazenmiller, G.V
• Chigirinskii, Yu.I
• Dudin, Yu.A
• Lesnikov, V.P
• Trushin, V.N
• Boldin, M.S
• Belkin, O.A
• Bobrov, A.A
• Sakharov, N.V

Titel

Manufacturing of Sputtering Composite Targets Containing Phases of [Co.sub.2]FeSi or [Co.sub.2]MnSi Heusler Alloy

Ist Teil von

• Technical physics, 2018-07, Vol.63 (7)

Ort / Verlag

Springer

Erscheinungsjahr

2018

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• The paper presents a method for manufacturing mechanically strong sputtering composite targets containing the phase of the [Co.sub.2]FeSi or [Co.sub.2]MnSi Heusler alloy of the stoichiometric composition, which can be used for fabrication of spin electronic devices by high-frequency magnetron deposition and pulsed laser deposition of thin films. DOI: 10.1134/S1063784218070095