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Optimization of thermoelectric properties on Bi 2Te 3 thin films deposited by thermal co-evaporation
Ist Teil von
Thin solid films, 2010, Vol.518 (10), p.2816-2821
Ort / Verlag
Elsevier B.V
Erscheinungsjahr
2010
Link zum Volltext
Quelle
Alma/SFX Local Collection
Beschreibungen/Notizen
The optimization of the thermal co-evaporation deposition process for n-type bismuth telluride (Bi
2Te
3) thin films deposited onto polyimide substrates and intended for thermoelectric applications is reported. The influence of deposition parameters (evaporation rate and substrate temperature) on film composition and thermoelectric properties was studied for optimal thermoelectric performance. Energy-dispersive X-ray spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy and Raman spectroscopy confirmed the formation of Bi
2Te
3 thin films. Seebeck coefficient (up to 250
μV
K
−
1
), in-plane electrical resistivity (≈10
μΩ
m), carrier concentration (3×10
19–20×10
19
cm
−
3
) and Hall mobility (80–170
cm
2
V
−
1
s
−
1
) were measured at room temperature for selected Bi
2Te
3 samples.