Details

Autor(en) / Beteiligte

• Ye, Zimeng
• Tan, Chao
• Huang, Xiaolei
• Ouyang, Yi
• Yang, Lei
• Wang, Zegao
• Dong, Mingdong

Titel

Emerging MoS2 Wafer-Scale Technique for Integrated Circuits

Ist Teil von

• Nano-micro letters, 2023-12, Vol.15 (1), p.38-38, Article 38

Ort / Verlag

Singapore: Springer Nature Singapore

Erscheinungsjahr

2023

Link zum Volltext

Quelle

Elektronische Zeitschriftenbibliothek (Open access)

Beschreibungen/Notizen

• Highlights This review summarized the state of the art of MoS 2 from their controllable growth and potential application in integrated circuit. The influence of promoter, substrate, pressure, catalyst and precursor on the nucleation and growth are discussed. The current challenges and future perspectives of wafer-scale MoS 2 are outlined from the materials and device applications. As an outstanding representative of layered materials, molybdenum disulfide (MoS 2 ) has excellent physical properties, such as high carrier mobility, stability, and abundance on earth. Moreover, its reasonable band gap and microelectronic compatible fabrication characteristics makes it the most promising candidate in future advanced integrated circuits such as logical electronics, flexible electronics, and focal-plane photodetector. However, to realize the all-aspects application of MoS 2 , the research on obtaining high-quality and large-area films need to be continuously explored to promote its industrialization. Although the MoS 2 grain size has already improved from several micrometers to sub-millimeters, the high-quality growth of wafer-scale MoS 2 is still of great challenge. Herein, this review mainly focuses on the evolution of MoS 2 by including chemical vapor deposition, metal–organic chemical vapor deposition, physical vapor deposition, and thermal conversion technology methods. The state-of-the-art research on the growth and optimization mechanism, including nucleation, orientation, grain, and defect engineering, is systematically summarized. Then, this review summarizes the wafer-scale application of MoS 2 in a transistor, inverter, electronics, and photodetectors. Finally, the current challenges and future perspectives are outlined for the wafer-scale growth and application of MoS 2 .