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Details

Autor(en) / Beteiligte
Titel
Effect of passivation on microwave power performances of AlGaN/GaN/Si HEMTs
Ist Teil von
  • Sensors & transducers, 2014-05, Vol.27 (Special Issue), p.277-279
Ort / Verlag
IFSA Publishing, S.L
Erscheinungsjahr
2014
Link zum Volltext
Quelle
EZB Free E-Journals
Beschreibungen/Notizen
  • This paper reports on the use of plasma assisted molecular beam epitaxy of AlGaN/GaN high electron mobility transistors (HEMTs) grown on silicon substrate. Surface passivation effects on AlGaN/GaN HEMTs were studied using SiO2/SiN dielectric layers grown by plasma enhanced chemical vapor deposition. The direct current measurement, pulsed characteristics and microwave small-signal characteristics were studied before and after passivation. An improvement of drain-source current density and the extrinsic transconductance was observed on the passivated HEMTs when compared with the unpassivated HEMTs. An enhancement of cut-off frequency (ft) and maximum power gain (fmax) was also observed for the devices with full SiO2/SiN passivation. A good correlation is found between pulsed and power measurements. Copyright © 2014 IFSA Publishing, S. L.
Sprache
Englisch
Identifikatoren
ISSN: 2306-8515
eISSN: 1726-5479
Titel-ID: cdi_doaj_primary_oai_doaj_org_article_3ef5cb9c7be3461a8196346556f3eb6b

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