Details

Autor(en) / Beteiligte

• Borude, Ranjit R.
• Sugiura, Hirotsugu
• Ishikawa, Kenji
• Tsutsumi, Takayoshi
• Kondo, Hiroki
• Han, Jeon Geon
• Hori, Masaru

Titel

Modifications of surface and bulk properties of magnetron-sputtered carbon films employing a post-treatment of atmospheric pressure plasma

Ist Teil von

• Japanese Journal of Applied Physics, 2019-02, Vol.58 (SA), p.SAAC07

Ort / Verlag

IOP Publishing

Erscheinungsjahr

2019

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• Control of the bonding structure in carbon materials is achieved by a post-treatment of atmospheric pressure plasma (APP) for magnetron-sputtered carbon films. The APP post-treatment changes the films morphologically owing to the removal and modification of sp2 bonds on the basis of the near edge X-ray absorption fine structure analysis of sp2 contents. By APP post-treatment, the resulting changes in surface and bulk properties modify the optical and electrical properties of the carbon films. The control of the film properties can be utilized for various applications, such as gas sensors and solar cells.