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Cube texture formation of Cu-33 at.%Ni alloy substartes and CeO2 buffer layer prepared by chemical solution deposition on the textured substrate were investigated by electron back scattered diffraction (EBSD) and XRD technics systematically. The results shown that a strong cube textured Cu-33at.%Ni alloy substrate with the cube texture fraction of 99.8 % (< 10°) was obtained after annealing at 1000°C for 1 h. The full width half maximum (FWHM) values for the X-ray (111) phi-scan and (002) omega-scan in this substrate were 7.31° and 5.51°, respectively. Furthermore, the cube texture fraction of epitaxially grown CeO2 buffer layer was 95 % (< 10°), and the FWHM values of phi-scan and omega-scan being 6.98° and 5.92°, respectively.