Details

Autor(en) / Beteiligte

• Yamamoto, Kanta
• Tamada, Kohzo
• Okamoto, Kana
• Amano, Sho
• Yamaguchi, Akinobu
• Utsumi, Yuichi
• Yamasaki, Tohru

Titel

Speculation of Mechanical Properties of Ni-W Micro-gears Fabricated by LIGA Process

Ist Teil von

• Journal of Photopolymer Science and Technology, 2023/06/15, Vol.36(2), pp.123-126

Ort / Verlag

The Society of Photopolymer Science and Technology(SPST)

Erscheinungsjahr

2023

Quelle

Elektronische Zeitschriftenbibliothek (Open access)

Beschreibungen/Notizen

• Microgears made of Ni-W alloy that are expected to have high durability, were successfully fabricated by using the LIGA process with synchrotron radiation. In this study, Ni-W electrodeposited alloy microgears were mechanically evaluated. The LIGA process based on the synchrotron radiation facility, New SUBARU at the University of Hyogo was performed at the Beamline BL11 (electron energy: 1.0 GeV). A dimensional evaluation of the fabricated microgears showed that they could be fabricated with a high accuracy of a few percent from the design value. Tensile tests and Vickers hardness tests presented that the Ni-W electrodeposited alloy has excellent material properties in terms of both strength and ductility. As a result, micro gears with high precision, high strength, and high ductility can be fabricated using this process.