Details

Autor(en) / Beteiligte

• Nickel, Norbert
• Saleh, Rosari
• Fuhs, Walther
• Mell, Helmut

Titel

Amorphous Silicon Thin-Film Transistors Modified by Doping and Plasma Treatment of the Nitride

Ist Teil von

• MRS proceedings, 1991, Vol.219, Article 309

Ort / Verlag

New York, USA: Cambridge University Press

Erscheinungsjahr

1991

Beschreibungen/Notizen

• Thin—film transistors (TFTs) were prepared by the glow—discharge deposition of amorphous silicon nitride (a—SiNx:H) and amorphous silicon (a—Si:H). The properties of these TFTs were varied in two ways: a) doping of the amorphous silicon film with phosphine or diborane and b) exposure of the a—SiNx:H film to an oxygen plasma prior to the deposition of the a—Si:H layer. The TFTs are characterized by measurements of the transfer characteristic, ISD(VG) and of the effective density of interface states, Ni(E), using a transient current spectroscopy (TCS). The dependence of Ni(E) on the Fermi—level position in the a—Si:H film suggests that for EC—EF > 0.6eV this quantity is mainly determined by interface related defect states whereas for Ec,—EF <0.6eV it is determined by doping—induced defect states. The exposure to the oxygen plasma results in a reduction of Ni in both the upper and lower half of the gap and in an improvement of the characteristic, in particular in p—channel TFTs. These changes are discussed in terms of the chemical-equilibrium or defect—pool concept.