Details

Autor(en) / Beteiligte

• Das Kanungo, Pratyush
• Helfenstein, Patrick
• Guzenko, Vitaliy
• Lee, Chiwon
• Paraliev, Martin
• Tsujino, Soichiro

Titel

Electron beam collimation from an all-metal double-gate 40 000 nanotip array: Improved emission current and beam uniformity upon neon gas conditioning

Ist Teil von

• Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2015-05, Vol.33 (3)

Erscheinungsjahr

2015

Quelle

AIP Journals (American Institute of Physics)

Beschreibungen/Notizen

• In this study, the authors characterized field emission for stacked-double-gate all-metal field emitter arrays (FEAs) consisting of 40 000 nanotips. After careful conditioning of the FEAs under ultrahigh vacuum and in low-pressure neon gas ambient, the authors were able to produce a highly collimated beam with a current of ∼50 μA which showed an improved beam homogeneity. The beam rms radius reduced by a factor 10 and the transverse energy spread was reduced to well below 1 eV.