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An extensive study is presented to describe the impact of partial hybridization on the device electrostatics and on current of a silicon dielectric-modulated tunnel field effect transistor (DM-TFET). To gain insight into the various design considerations and factors influencing the sensitivity, both process-related issue such as cavity length variation and real-time issues related to biomolecules behavior such as partial hybridization, charge, and position of receptors/target molecules have been investigated through extensive numerical simulations. The results indicate that TFET-based sensor does not suffer from scaling issues and thus can help in miniaturization without compromising the sensitivity, unlike a nanogap-embedded DM-FET.