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IEEE/ASME transactions on mechatronics, 2022-10, Vol.27 (5), p.3999-4010
2022

Details

Autor(en) / Beteiligte
Titel
Design, Assessment, and Trajectory Control of a Novel Decoupled Robotic Nanomanipulator
Ist Teil von
  • IEEE/ASME transactions on mechatronics, 2022-10, Vol.27 (5), p.3999-4010
Ort / Verlag
New York: IEEE
Erscheinungsjahr
2022
Link zum Volltext
Quelle
IEEE Xplore Digital Library
Beschreibungen/Notizen
  • To avoid the problems of low bandwidth or complex structure brought by conventional serial and parallel mechanisms, a novel decoupled robotic nanomanipulator (DRNM) with a hybrid configuration is conceived in this article to enable fast nanoscale manipulation. The proposed DRNM employs a new hybrid compliant structure to actuate the terminal platform and decouple the x - and y -axial motions. The unique hybrid mechanism is devised using two H-shaped parallelogram flexures that are assembled in a serial manner and actuated in a parallel manner, bringing in the merits of a flexible terminal platform, compact structure, good decoupling, and wide bandwidth in working directions. To enhance the dynamic positioning performance of the proposed DRNM, a run-to-run-position-forward-based integral controller that can handle the hysteresis nonlinearity of the piezoelectric actuator with adaptive zero-point parameter is further designed. The DRNM prototype is tested having an in-plane resonant frequency of 2005 Hz and a cross coupling of 0.88%. While tracking a circular trajectory with a diameter of 3 µm at a frequency of 20 Hz, the DRNM exhibits a maximum filtered tracking error of 4.3 nm.
Sprache
Englisch
Identifikatoren
ISSN: 1083-4435
eISSN: 1941-014X
DOI: 10.1109/TMECH.2022.3147767
Titel-ID: cdi_crossref_primary_10_1109_TMECH_2022_3147767

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