Sie befinden Sich nicht im Netzwerk der Universität Paderborn. Der Zugriff auf elektronische Ressourcen ist gegebenenfalls nur via VPN oder Shibboleth (DFN-AAI) möglich. mehr Informationen...
Silicon planar technology for single-photon optical detectors
Ist Teil von
IEEE transactions on electron devices, 2003-04, Vol.50 (4), p.918-925
Ort / Verlag
New York: IEEE
Erscheinungsjahr
2003
Quelle
IEEE Electronic Library (IEL)
Beschreibungen/Notizen
Design and fabrication of single photon avalanche detector (SPAD) in planar technology is reported. Device design and critical issues in the technology are discussed. Experimental test procedures are described for dark-counting rate, afterpulsing probability, photon timing resolution, and quantum detection efficiency. Low-noise detectors are obtained, with dark counting rates down to 10 c/s for devices with 10 /spl mu/m diameter, down to 1 kc/s for 50 /spl mu/m diameter. The technology is suitable for monolithic integration of SPAD detectors and associated circuits.