Details

Autor(en) / Beteiligte

• McDonald, Joel P.
• Nees, John A.
• Yalisove, Steve M.

Titel

Pump-probe imaging of femtosecond pulsed laser ablation of silicon with thermally grown oxide films

Ist Teil von

• Journal of applied physics, 2007-09, Vol.102 (6)

Erscheinungsjahr

2007

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• Femtosecond pulsed laser ablation of silicon substrates with thin thermally grown oxide films (20–1200 nm) was studied using pump-probe microscopy techniques. Images from both the front and side of the ablation event produced at a laser fluence of 1.3 J/cm2 were obtained, and results from the two imaging geometries were compared yielding the optical properties of the ablated material. Ablation dynamics were studied over the time scale from 0 to 10.35 ns following the onset of ablation, and ablated material velocities ranging from 200±20 to −3010±360 m/s were determined depending on the thermal oxide film thickness.