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Porous tungsten oxide films were deposited onto a sensor substrate with a Si bulk-micromachined hotplate, by drop-coating isopropyl alcohol solution of highly crystalline tungsten oxide
(
W
O
2.72
)
nanorods with average
75
nm
length and
4
nm
diameter. The temperature-dependent gas sensing characteristics of the films have been investigated over the mild temperature range from
20
to
250
°
C
. While the sensing responses for ammonia vapor showed increase in electrical conductivity at temperatures above
150
°
C
as expected for
n
-type metal oxide sensors, they exhibited the opposite behavior of unusual conductivity decrease below
100
°
C
. Superb sensing ability of the sensors at room temperature in conjunction with their anomalous conductivity behavior might be attributed to unique nanostructural features of very thin, nonstoichiometric
W
O
2.72
.
Sprache
Englisch
Identifikatoren
ISSN: 0003-6951
eISSN: 1077-3118
DOI: 10.1063/1.1929872
Titel-ID: cdi_crossref_primary_10_1063_1_1929872
Format
–
Weiterführende Literatur
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