Details

Autor(en) / Beteiligte

• Liniger, E. G.
• Simonyi, E. E.

Titel

Moisture-driven crack growth in blanket low dielectric constant and ultralow dielectric constant films

Ist Teil von

• Journal of applied physics, 2004-09, Vol.96 (6), p.3482-3485

Erscheinungsjahr

2004

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• Moisture-driven crack growth was measured as a function of film thickness for a variety of low dielectric constant and ultralow dielectric constant films and a comparison of the crack driving force was made. By plotting the crack velocity versus the crack driving force, a series of universal curves was produced which showed that fracture resistance scales with the dielectric constant.