Details

Autor(en) / Beteiligte

• Bower, C.
• Zhu, W.
• Shalom, D.
• Lopez, D.
• Chen, L. H.
• Gammel, P. L.
• Jin, S.

Titel

On-chip vacuum microtriode using carbon nanotube field emitters

Ist Teil von

• Applied physics letters, 2002-05, Vol.80 (20), p.3820-3822

Erscheinungsjahr

2002

Link zum Volltext

Quelle

美国小型学会期刊集（AIP Scitation平台）

Beschreibungen/Notizen

• We show a fully integrated, on-chip, vacuum microtriode fabricated via silicon micromachining processes using carbon nanotubes as field emitters. The triode is constructed laterally on a silicon surface using microelectromechanical systems (MEMS) design and fabrication principles. The technique incorporates high-performance nanomaterials in a MEMS design with mature solid-state fabrication technology to create miniaturized, on-chip power amplifying vacuum devices, which could have important and far-reaching scientific and technological implications.