Details

Autor(en) / Beteiligte

• Bedson, T. R.
• Palmer, R. E.
• Jenkins, T. E.
• Hayton, D. J.
• Wilcoxon, J. P.

Titel

Quantitative evaluation of electron beam writing in passivated gold nanoclusters

Ist Teil von

• Applied physics letters, 2001-03, Vol.78 (13), p.1921-1923

Erscheinungsjahr

2001

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists.