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In this study, metal–semiconductor–metal (MSM) photoconductive detector was fabricated on
c-axis preferred oriented ZnO film prepared on quartz by radio frequency magnetron sputtering. With the applied bias below 3
V, the dark current was below 250
nA. The typical responsivity peaked at around 360
nm, and had values of 30
A/W. In addition, the UV (360
nm) to visible (450
nm) rejection ratio of around five orders could be extracted from the spectra response. Furthermore, the transient response measurement revealed fast photoresponse with a rise time of 20
ns.