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A Stacked Multi-Sensor Platform for Real-Time MRI Guided Interventions
Ist Teil von
Optics and lasers in engineering, 2023-02, Vol.161, p.107323, Article 107323
Ort / Verlag
Elsevier Ltd
Erscheinungsjahr
2023
Quelle
Elsevier ScienceDirect Journals
Beschreibungen/Notizen
•We present a MEMS sensor readout glasses pair for monitoring Intraocular pressure.•The proposed device can operate under ±8 degrees of eye tilt.•A reference grating is used to cancel out intensity deviations due to external factors.•40 mmHg pressure range is demonstrated with near 4 nm/mmHg displacement sensitivity
We present a stacked temperature, pressure, and localization platform, targeted for minimally invasive surgical and diagnostic applications under Magnetic Resonance Imaging. The platform comprises a micro-fabricated three-layer (Titanium-Parylene-Titanium) membrane pressure sensor, a Gallium Arsenide band-gap temperature sensor, and a magnetic material on double prism retro-reflector that benefits from Magneto-Optic Kerr effect as a magnetic field sensor, to provide localization feedback under Magnetic Resonance Imaging. All sensors can be addressed with a single fiber optic cable, where the collected light is directed to a spectrometer and a polarimeter. For the three-layer microfabricated membrane sensor, an analytical formulation is derived, linking the pressure to optical intensity. Moreover, finite-element simulation results are provided, verifying analytical findings. Wavelength division multiplexing is exploited to address the sensors simultaneously. We measured sensitivities of 0.025 millidegree/Gauss rotation of polarization, 1.5 nm/mmHg displacement (in agreement with simulation results and analytical findings), 0.36 nm/°C bandgap wavelength shift for magnetic field, pressure, and temperature sensors; respectively. With further development, the proposed device can be adapted to a clinical setting for use in Magnetic Resonance assisted surgical procedures.