Details

Autor(en) / Beteiligte

• Aliane, A.
• Agnese, P.
• Pigot, C.
• Sauvageot, J.-L.
• de Moro, F.
• Ribot, H.
• Gasse, A.
• Szeflinski, V.
• Gobil, Y.

Titel

Design and fabrication process of silicon micro-calorimeters on simple SOI technology for X-ray spectral imaging

Ist Teil von

• Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2008-09, Vol.594 (2), p.210-214

Ort / Verlag

Elsevier B.V

Erscheinungsjahr

2008

Link zum Volltext

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• Several successful development programs have been conducted on infra-red bolometer arrays at the “Commissariat à l’Energie Atomique” (CEA-LETI Grenoble) in collaboration with the CEA-SAp (Saclay); taking advantage of this background, we are now developing an X-ray spectro-imaging camera for next generation space astronomy missions, using silicon only technology. We have developed monolithic silicon micro-calorimeters based on implanted thermistors in an improved array that could be used for future space missions. The 8×8 array consists of a grid of 64 suspended pixels fabricated on a silicon on insulator (SOI) wafer. Each pixel of this detector array is made of a tantalum (Ta) absorber, which is bound by means of indium bump hybridization, to a silicon thermistor. The absorber array is bound to the thermistor array in a collective process. The fabrication process of our detector involves a combination of standard technologies and silicon bulk micro-machining techniques, based on deposition, photolithography and plasma etching steps. Finally, we present the results of measurements performed on these four primary building blocks that are required to create a detector array up to 32×32 pixels in size.