Details

Autor(en) / Beteiligte

• Fang, Hua-Bin
• Liu, Jing-Quan
• Xu, Zheng-Yi
• Dong, Lu
• Wang, Li
• Chen, Di
• Cai, Bing-Chu
• Liu, Yue

Titel

Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting

Ist Teil von

• Microelectronics, 2006-11, Vol.37 (11), p.1280-1284

Ort / Verlag

Elsevier Ltd

Erscheinungsjahr

2006

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• A MEMS-based energy harvesting device, micro piezoelectric power generator, is designed to convert ambient vibration energy to electrical power via piezoelectric effect. In this work, the generator structure of composite cantilever with nickel metal mass is devised. Micro-electronic-mechanical systems (MEMS) related techniques such as sol–gel, RIE dry etching, wet chemical etching, UV-LIGA are developed to fabricate the device and then its performance is measured on vibration testing setup. The investigation shows that the designed device is expected to resonantly operate in low-frequency environmental vibration through tailoring the structure dimension. Under the resonant operation with frequency of about 608Hz, a first prototype of the generator result in about 0.89V AC peak–peak voltage output to overcome germanium diode rectifier toward energy storage, and its power output is in microwatt level of 2.16μW.