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•ETLTiO2 were prepared by Sol-gel and DC-PMS techniques, respectively.•(001) lattice in ETLSol-gelTiO2 was random.•(001) lattice in ETLDC-PMSTiO2 was parallel to the surface.•(001) lattice plane restrain the diffusion of N+ or NHx+ in ETLTiO2.•N+ or NHx+ diffusion has little influence on band structure of ETLDC-PMSTiO2.
TiO2 ETL were prepared by DC-PMS and Sol-gel techniques respectively, which could be used in perovskite solar cells. N+ and NHx+ ions/group beam was used to bombard the surface of Sol-gel and DC-PMS TiO2 ETLs. After the bombardment, the surface potential and sheet carrier concentration of Sol-gel TiO2 ETL obviously deteriorated from 4.66 to 4.43 eV and 2.17 to 0.41 (1011/cm2), respectively. On the contrary, little deterioration happened onto the surface potential and sheet carrier concentration of DC-PMS TiO2 ETL, which decreased from 4.81 to 4.79 eV and 2.02 to 1.63 (1011/cm2), respectively. Besides, the deterioration of surface potential and sheet carrier concentration for Sol-gel and DC-PMS TiO2 ETLs was discussed.