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•Innovatively combining functions of the transparent electrode and encapsulation layer by cutting-edge hybrid superlattice structure of ZnO and self-assembled monolayers.•Exceptional electrical conductivity achieved through optimal amorphous/crystalline phase-composite engineering in the ZnO nanolayers.•Effective moisture barrier enhancement under harsh environment condition by the coupling of periodic organic layers.
Transparent electrodes and passivation layers find extensive application in optoelectronic devices such as light-emitting diodes, solar cell. Integrating transparent conductive and gas diffusion barrier layers into a unified component holds promise for enhancing device performance and cost-effectiveness. However, research on these dual-function materials remains relatively scarce. Here, we introduce an innovative hybrid superlattice composed of ZnO and self-assembled monolayers, designed to function simultaneously as transparent conductive and gas diffusion barrier. Fabricated using low-temperature atomic layer deposition and molecular layer deposition techniques, the hybrid superlattice exhibited robust electric conductivity (surpassing 1400 S cm-1), exceptional moisture barrier characteristics (water vapor transmission rate < 4 × 10-7 g m-2 day-1), and remarkable flexibility. We systematically investigated the significant electrical improvement, attributing it to the formation of a well-defined amorphous/crystalline phase-composite structure in the ZnO nanolayer. Moreover, the organic layers in the superlattice enhance resilience against environmental degradation and mechanical deformation by forming a multilayered structure that effectively decouples defects in the underlying layers. These compelling features position the hybrid superlattice as a promising candidate for transparent conductive gas diffusion barriers, with diverse applications in emerging optoelectronics.