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•To alleviate the issues plaguing conventional nanotube array production, a novel nanotube array fabrication scheme involving direct printing and oblique-angle deposition (OAD) performed by e-beam evaporation was devised.•The type of master stamp used in direct printing and the OAD parameters were adjusted to yield differently shaped nanotube arrays.•Nanotube arrays containing diverse metals or inorganic compounds as well as those with multilayer or core–shell structures were successfully fabricated.
Nanomaterials typically exhibit physical and chemical properties that differ from those of conventional bulk materials owing to their nanometer-scale structures. Among them, nanotube arrays are characterized by their ability to exhibit remarkably aligned larger surface areas than those of existing arrays. Consequently, they have been used to increase efficiency in various fields such as sensing, energy storage and conversion, and optical communication. Processes such as anodic-aluminum-oxide templating, secondary sputtering, and sputtering are generally used to manufacture nanotube arrays. However, these methods have limitations in creating periodically aligned structures and precisely controlling nanotube characteristics such as diameter, period, and height. Therefore, a method combining direct printing and oblique-angle deposition (OAD) performed by e-beam evaporation is reported in this study for generating nanotubes with a highly ordered periodicity. Using this approach, nanotube arrays of various shapes and specifications can be manufactured by adjusting the type of master stamp used in the direct printing and the OAD parameters. Additionally, this scheme can be leveraged to produce nanotube arrays with metals, inorganic compounds, multilayer structures, and core–shell configurations.
A method of fabricating a nanotube arrays combining direct printing and oblique angle deposition (OAD) performed by electron beam evaporation. With this approach, nanotube arrays of diverse shapes and specifications can be produced by modifying the type of master stamp utilized in direct printing and adjusting the OAD parameters. Moreover, this method can be utilized to fabricate nanotube arrays containing metals, inorganic compounds, multilayer structures, and core-shell configurations. [Display omitted]