Details

Autor(en) / Beteiligte

• Zhang, Q.Y
• Long, Z.H
• Ren, C.S
• Guo, B.H
• Xu, D.Q
• Ma, T.C

Titel

Multi-beam mixing implantation system and its applications

Ist Teil von

• Surface & coatings technology, 1998-05, Vol.103, p.195-199

Ort / Verlag

Elsevier B.V

Erscheinungsjahr

1998

Link zum Volltext

Quelle

Elsevier Journal Backfiles on ScienceDirect (DFG Nationallizenzen)

Beschreibungen/Notizen

• A new apparatus for materials modification named multi-beam mixing implantation system was built. Seven kinds of beams, including three kinds of ion beams with the energies of 100, 40 and 5 keV, two vacuum arc plasma deposition beams, an electron beam, and a sputtered atom beam were designed in the system. The beam lines can be controlled independently. Some processing technologies for materials modification such as ion beam dynamic mixing with stoichiometric composition, ion implantation and ion beam dynamic mixing assisted by an electron beam irradiated, and ion beam assisted deposition can be achieved in the system. As the applications of the system, TiN coatings with excellent performance in corrosion resistance, hardness, etc. were synthesized and a polymer film with a special heat transfer in steam condensation—dropwise condensation—was fabricated.