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The outgassing from TiN and BN films grown on stainless steel by IBAD
Ist Teil von
Vacuum, 1999-05, Vol.53 (1), p.303-307
Ort / Verlag
Elsevier Ltd
Erscheinungsjahr
1999
Link zum Volltext
Quelle
Elsevier Journal Backfiles on ScienceDirect (DFG Nationallizenzen)
Beschreibungen/Notizen
In search of low-outgassing vacuum material, TiN and h-BN thin films were grown on stainless steel by ion beam assisted deposition (IBAD). The film structures and surface chemistries were studied by XRD, FT-IR, XPS, and Auger depth profile. The outgassing rates of bare, TiN coated, and two h-BN coated AISI 304 samples were compared by using thermal desorption spectroscopy. XPS showed that some Ti–Ti bonds remained in as-deposited TiN, and these excess Ti seemed to cause a sharp increase in H
2 peak at 360°C. All coatings reduced the outgassing, but the h-BN sample grown at a substrate temperature of 200°C had the lowest outgassing rate.